Stiction in Low Humidity Environment

Abstract

The susceptibility of MEMS devices, treated with anti-stiction coatings, to stiction in a low humidity environment has been investigated for the first time. Wafer-level testing with a pull-in/pull-out voltage technique and current compliant source was used to detect stiction on capped and uncapped wafers. Devices capped in dry Nitrogen environment were… (More)

Topics

7 Figures and Tables

Slides referencing similar topics