Stick-slip based micropositioning stage for transmission electron microscope

  title={Stick-slip based micropositioning stage for transmission electron microscope},
  author={Ondřej Holub and Michael Spiller and Zdenek Hur{\'a}k},
  journal={9th IEEE International Workshop on Advanced Motion Control, 2006.},
This paper presents work that has been done on design of a micropositioning stage for a transmission electron microscope. Topics covered include mechanical design of the positioning stage, sawtooth-like high voltage generator, report on experimental identification of the system, some thoughts and experience with input command shaping, finite-element analysis and design of capacitive 2-axis position sensor and design of signal processing circuitry for this sensor