Statistical characterization of fracture of brittle MEMS materials

@inproceedings{Jones1999StatisticalCO,
  title={Statistical characterization of fracture of brittle MEMS materials},
  author={Peter Tom Jones and George C. Johnson and Roger T. Howe},
  booktitle={Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components},
  year={1999}
}
The fracture of brittle MEMS materials is often characterized by ultimate strength measures such as the maximum stress or strain in an element at failure. It has been known for many decades that a better way to characterize the strength of a brittle material on the macro-scale is to make use of statistical measures. This is due to the nature of brittle materials in which failure occurs when a critically sized flaw exists in the region that is under tensile stress. The distribution of flaws is… CONTINUE READING

Similar Papers

Citations

Publications citing this paper.
SHOWING 1-6 OF 6 CITATIONS

A novel method for measuring the strength of microbeams

  • Journal of Microelectromechanical Systems
  • 2006
VIEW 5 EXCERPTS
CITES METHODS & BACKGROUND
HIGHLY INFLUENCED

Micromechanical characterization of ALD thin films

VIEW 2 EXCERPTS
CITES METHODS & BACKGROUND

Measuring the Strength of Brittle Microbeams Without Measuring Forces or Displacements

  • EuroSime 2006 - 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems
  • 2006
VIEW 1 EXCERPT
CITES BACKGROUND