Statistical characterization of fracture of brittle MEMS materials

@inproceedings{Jones1999StatisticalCO,
  title={Statistical characterization of fracture of brittle MEMS materials},
  author={P. Jones and G. C. Johnson and R. Howe},
  booktitle={Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components},
  year={1999}
}
  • P. Jones, G. C. Johnson, R. Howe
  • Published in
    Photonics West - Micro and…
    1999
  • Engineering, Materials Science
  • The fracture of brittle MEMS materials is often characterized by ultimate strength measures such as the maximum stress or strain in an element at failure. It has been known for many decades that a better way to characterize the strength of a brittle material on the macro-scale is to make use of statistical measures. This is due to the nature of brittle materials in which failure occurs when a critically sized flaw exists in the region that is under tensile stress. The distribution of flaws is… CONTINUE READING
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