State-of-the-art in integrated optical microspectrometers

@article{Wolffenbuttel2004StateoftheartII,
  title={State-of-the-art in integrated optical microspectrometers},
  author={Reinoud F. Wolffenbuttel},
  journal={IEEE Transactions on Instrumentation and Measurement},
  year={2004},
  volume={53},
  pages={197-202}
}
Microspectrometers fabricated in silicon using microelectromechanical systems technologies are versatile microinstruments: small, lightweight, and featuring a demonstrated capability for spectral analysis. When realized using silicon process compatible technologies, low-cost batch fabrication of an intelligent optoelectronic system-on-a-chip is feasible by cointegration of optics with microelectronic circuits. However, the spectral resolution of devices presented so far has been limited to… CONTINUE READING
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