Standard Reference Materials(R) User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition

@inproceedings{Cassard2013StandardRM,
  title={Standard Reference Materials(R) User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition},
  author={Janet M. Cassard and Jon C. Geist and Theodore V. Vorburger and David Thomas Read and Michael Gaitan and David George Seiler},
  year={2013}
}

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