Stainless steel capacitive pressure sensor for hostile environments: Sample-to-sample variability and reliability characterization


Assembly-type stainless steel (SS) pressure sensors are promising low-cost devices for high-pressure, corrosive-media applications. This report studies media compatibility, sample-to-sample variance, and reliability testing, as a step toward validating commercial viability of the technology. The sensor is realized from four main elements: a SS diaphragm die… (More)


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