Stable electrodes and ultrathin passivation coatings for high temperature sensors in harsh environments

  title={Stable electrodes and ultrathin passivation coatings for high temperature sensors in harsh environments},
  author={D. J. Frankel and G. Bernhardt and B. Sturtevant and Thomas Moonlight and Mauricio Pereira da Cunha and R. J. Lad},
  journal={2008 IEEE Sensors},
Sensor operation in harsh environments up to 1000degC requires robust packages including stable electrodes and protective coatings. We have developed nanostructured ultra-thin (< 100 nm) Pt-10%Rh / ZrO2 electrode structures grown by e-beam co-evaporation that operate at temperatures approaching 1000degC. X-ray diffraction (XRD), resistivity, and electron microscopy (EM) studies indicate incorporation of ZrO2 within the film delays recrystallization, maintaining a stable morphology. We have also… CONTINUE READING
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