Stability and Resolution Analysis of a Phase-Locked Loop Natural Frequency Tracking System for MEMS Fatigue Testing

@inproceedings{Sun2002StabilityAR,
  title={Stability and Resolution Analysis of a Phase-Locked Loop Natural Frequency Tracking System for MEMS Fatigue Testing},
  author={Xiaotian Sun and Roberto Horowitz and K. Komvopoulos},
  year={2002}
}
An analysis of a nonlinear control system that was used to track the natural frequen a MEMS resonator is presented in this paper. A phase-locked loop system is used to the natural frequency of the resonator due to fatigue of the spring element. A mod the control system is established and the system behavior is analyzed using an ave method. The analysis provides a quantitative criterion for selecting the control gai achieve stability. Simulation results are shown to be in agreement with the… CONTINUE READING
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