Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices

@inproceedings{Zhang2007StabilityNA,
  title={Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices},
  author={Wenming Zhang and Guang Meng and Di Chen},
  year={2007}
}
Electrostatic micro-electro-mechanical system (MEMS ) is a special branch with a wide range of applications in sensing and actuati ng devices in MEMS. This paper provides a survey and analysis of the electrostatic for e of importance in MEMS, its physical model, scaling effect, stability, nonlinea rity and reliability in detail. It is necessary to understand the effects of electrostatic forces i n MEMS and then many phenomena of practical importance, such as pull-in instability a nd the effects… CONTINUE READING

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