Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices

  title={Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices},
  author={Wenming Zhang and Guang Meng and Di Chen},
Electrostatic micro-electro-mechanical system (MEMS ) is a special branch with a wide range of applications in sensing and actuati ng devices in MEMS. This paper provides a survey and analysis of the electrostatic for e of importance in MEMS, its physical model, scaling effect, stability, nonlinea rity and reliability in detail. It is necessary to understand the effects of electrostatic forces i n MEMS and then many phenomena of practical importance, such as pull-in instability a nd the effects… CONTINUE READING


Publications citing this paper.
Showing 1-10 of 16 extracted citations

Comparative analysis of 3D Flexure Gate FET with different metal and gate structure

2015 International Conference on Innovations in Information, Embedded and Communication Systems (ICIIECS) • 2015
View 1 Excerpt


Publications referenced by this paper.
Showing 1-10 of 121 references

A comprehensive model to predict the charging and reliability of capacitive RF MEMS swit ches

W.M.V. Spengen, R. Puers, R. Mertens, I. D. Wolf
J Micromech Microeng 2004, • 2004
View 5 Excerpts
Highly Influenced

Effects of electrical leakage currents on MEMS reli abi ty and performance

H. R. Shea, A. Gasparyan, +5 authors R. P. McConnel
IEEE Transactions on Device and Materials Reliability • 2004
View 10 Excerpts
Highly Influenced

Some design c onsiderations on the electrostatically actuated microstructures. Sensors and Actuators A

Y. C. Hu, C. M. Chang, S. C. Huang
View 7 Excerpts
Highly Influenced

MEMS reliability from a failure mechanisms perspective

Microelectronics Reliability • 2003
View 7 Excerpts
Highly Influenced

On forces in microelectromechanic l systems

Zhou, Shu-Ang
International Journal of Engineering Science 2003, • 2003
View 5 Excerpts
Highly Influenced

The advent of MEMS in space

View 9 Excerpts
Highly Influenced

Pull-in voltage analysis of electrostatically actuated beam structures with fix ed-fixed and fixed-free end conditions

S. Pamidighantam, R. Puers, K. Baert, H.A.C. Tilmans
J Micromech Microeng 2002, • 2002
View 5 Excerpts
Highly Influenced

Anodic oxides on silicon

H. J. Lewerenz
Electrochimica Acta 1992, • 1992
View 5 Excerpts
Highly Influenced

Nonlinear dynamical system of micro-cantilever under combined parametric and forcing excitations in MEMS

30th Annual Conference of IEEE Industrial Electronics Society, 2004. IECON 2004 • 2004
View 4 Excerpts
Highly Influenced