Sputtering of SmCo Thin Films and Integration Into a Ferrofluidic Microactuator

The fabrication of SmCo films using physical vapor deposition (PVD), patterning by wet-chemical etching, and liftoff techniques as well as annealing processes was investigated. The composition of the film can be adjusted by the applied sputter parameters, i.e., the deposition pressure, the substrate bias voltage, and the power density by using a composite… (More)