Sputter yields of insulators bombarded with hyperthermal multiply charged ions

@article{Varga1997SputterYO,
  title={Sputter yields of insulators bombarded with hyperthermal multiply charged ions},
  author={P. Varga and T. Neidhart and M. Sporn and G. Libiseller and M. Schmid and F. Aumayr and H. Winter},
  journal={Physica Scripta},
  year={1997},
  volume={73},
  pages={307-310}
}
The total sputter yield for Au, Si, GaAs, SiO2, MgO, LiF and NaCl bombarded with hyperthermal highly charged Arq+ ions (q = 1-9) has been measured. Only for alkali halides (LiF, NaCl) and to some extent for SiO2 potential sputtering (enhancement of the sputter yield with increasing charge state of the primary ion) has been observed. All other targets showed normal collision induced sputtering. From that result it is obvious that the mechanisms for sputtering can not be explained by the Coulomb… Expand
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Potential sputtering
  • F. Aumayr, H. Winter
  • Medicine, Materials Science
  • Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences
  • 2003
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References

SHOWING 1-10 OF 11 REFERENCES
Potential sputtering of lithium fluoride by slow multicharged ions.
...
1
2
...