Spurious mode suppression via apodization for 1 GHz AlN Contour-Mode Resonators

@article{Giovannini2012SpuriousMS,
  title={Spurious mode suppression via apodization for 1 GHz AlN Contour-Mode Resonators},
  author={Massimo Giovannini and Sezen Yazici and N. Kuo and Gianluca Piazza},
  journal={2012 IEEE International Frequency Control Symposium Proceedings},
  year={2012},
  pages={1-5}
}
This paper reports, for the first time, on the application of apodization techniques to 1 GHz MEMS AlN Contour-Mode Resonators (CMRs [1]) to efficiently suppress spurious modes in close proximity of the main mechanical resonance. This concept has been applied with excellent results to a variety of one port resonators formed by patterned top electrodes made out of Aluminum, and a floating bottom electrode made out of Platinum sandwiching the AlN film. As also predicted by 3D COMSOL simulations… CONTINUE READING
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