Split Ring Resonators (SRRs) Based on Micro-Electro-Mechanical Deflectable Cantilever-Type Rings: Application to Tunable Stopband Filters

@article{Bouyge2011SplitRR,
  title={Split Ring Resonators (SRRs) Based on Micro-Electro-Mechanical Deflectable Cantilever-Type Rings: Application to Tunable Stopband Filters},
  author={D. Bouyge and David Mardivirin and Jordi Bonache and Aurelian Crunteanu and Arnaud Pothier and Miguel Dur{\'a}n-Sindreu and Pierre Blondy and Ferran Mart{\'i}n},
  journal={IEEE Microwave and Wireless Components Letters},
  year={2011},
  volume={21},
  pages={243-245}
}
A new principle for the implementation of tunable split ring resonators (SRRs) is presented. The rings forming the SRRs are partly fixed to the substrate (anchor) and partly suspended (up-curved cantilever). Through electrostatic actuation, the suspended parts are deflected down, the distributed capacitance between the pair of coupled rings is modified, and hence the resonance frequency of the SRR can be electrically tuned. To obtain electrically movable rings, a cantilever-type micro-electro… CONTINUE READING
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