Spiral-tube parylene intraocular pressure sensor

  title={Spiral-tube parylene intraocular pressure sensor},
  author={Po-Jui Chen and D. Rodger and Yu-Chong Tai and M. S. Humayun},
  journal={18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.},
This paper presents the first biocompatible, all-mechanical, micromachined pressure sensor with a high-aspect-ratio spiral-tube structure fabricated through a one-layer parylene process. This passive sensor has zero power consumption and indicates the pressure variation by changes of in situ in-plane spiral rotation, which can be gauged externally by a direct and convenient optical observation. A 1 mm-radius device with a 10-turn spiral has demonstrated a 0.22 degree/mmHg sensitivity in liquid… CONTINUE READING


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