• DOI:10.1088/0022-3727/39/3/010
Corpus ID: 34621555

Spectral control of emissions from tin doped targets for extreme ultraviolet lithography

@article{Harilal2006SpectralCO,
  title={Spectral control of emissions from tin doped targets for extreme ultraviolet lithography},
  author={S. S. Harilal and B. O’Shay and M. S. Tillack and Y. Tao and R. Paguio and A. Nikroo and C. Back},
  journal={Journal of Physics D},
  year={2006},
  volume={39},
  pages={484-487}
}

• S. S. Harilal, B. O’Shay, +4 authors C. Back
• Published 2006
• Materials Science
• Journal of Physics D

We have investigated the unresolved transition array (UTA) emission around 13.5 nm from solid density tin and tin doped foam targets. Extreme ultraviolet (EUV) spectral measurements were made in the wavelength region 11–17 nm using a transmission grating spectrograph and the EUV in-band conversion efficiency was measured using an absolutely calibrated EUV calorimeter. The aim of this work was to optimize the UTA emission with the proper density of tin dopant in low-Z foam targets. The addition… Expand

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