Spectral control of emissions from tin doped targets for extreme ultraviolet lithography
@article{Harilal2006SpectralCO, title={Spectral control of emissions from tin doped targets for extreme ultraviolet lithography}, author={S. S. Harilal and B. O’Shay and Mark S. Tillack and Yezheng Tao and R. R. Paguio and Abbas Nikroo and Christina A. Back}, journal={Journal of Physics D: Applied Physics}, year={2006}, volume={39}, pages={484 - 487} }
We have investigated the unresolved transition array (UTA) emission around 13.5 nm from solid density tin and tin doped foam targets. Extreme ultraviolet (EUV) spectral measurements were made in the wavelength region 11–17 nm using a transmission grating spectrograph and the EUV in-band conversion efficiency was measured using an absolutely calibrated EUV calorimeter. The aim of this work was to optimize the UTA emission with the proper density of tin dopant in low-Z foam targets. The addition…
62 Citations
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- Physics
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