Speciation of BC(x)N(y) films grown by PECVD with trimethylborazine precursor.

Abstract

Films of BC(x)N(y) were produced in a plasma-enhanced chemical vapor deposition process using trimethylborazine as precursor and with H2, He, N2, and NH3, respectively, as auxiliary gas. These films deposited on Si(100) wafers or fused quartz glass substrates were characterized chemically by X-ray photoelectron spectroscopy and by synchrotron radiation… (More)
DOI: 10.1007/s00216-009-3056-6

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Cite this paper

@article{Baake2009SpeciationOB, title={Speciation of BC(x)N(y) films grown by PECVD with trimethylborazine precursor.}, author={Olaf Baake and Peter S Hoffmann and Andreas Klein and Beatrix Pollakowski and Burkhard Beckhoff and Marina L Kosinova and Nadeshda I Fainer and Veronica S Sulyaeva and Valentina A Trunova and Wolfgang J. Ensinger}, journal={Analytical and bioanalytical chemistry}, year={2009}, volume={395 6}, pages={1901-9} }