Special capabilities of an optimized contact/proximity aligner for applications using DuPont Riston

  • C. Reyerse
  • Published 1990 in
    8th IEEE/CHMT International Conference on…


The author describes the essential elements of a mask aligner configured to meet the demands of the high-density microinterconnect (HDMI) market. Emphasis is placed on the specific requirements of DuPont Riston when used with multichip module substrates. Issues specific to use of Dupont Riston on typical HDMI substrates, as well as the specifications of the… (More)