Spatially resolved atomic excitation temperatures in CH4/H2 and C3H8/H2 RF discharges by optical emission spectroscopy

@inproceedings{Chingsungnoen2007SpatiallyRA,
  title={Spatially resolved atomic excitation temperatures in CH4/H2 and C3H8/H2 RF discharges by optical emission spectroscopy},
  author={Artit Chingsungnoen and John Ivor Barrett Wilson and Vittaya Amornkitbamrung and Cecilien Thomas and Thanusit Burinprakhon},
  year={2007}
}
Spatially resolved optical emission spectroscopy was used to determine the atomic excitation temperature of the capacitively coupled radio-frequency (RF) plasma system. Low pressure plasmas of methane or propane in hydrogen were excited at 13.56 MHz in a parallel plate system. Ar was added as an actinometer. Optical emission lines in the 300–850 nm spectral range were investigated at typical conditions of 100 W RF power, ~30 mTorr pressure, 20 mm electrode spacing and 50 sccm total flow rate… CONTINUE READING