Spatially Selective Growth and Modification of Wide Bandgap Semiconductor Surfaces

  • Brian D. Thorns

Abstract

Public reporting tHjdon for thl» collection of information li • •tlmatad to avafag« 1 fx>uf per raayonw«, rududiiy tlu timo for rovlevrlng inorfLCUonl, acafCNng GXjaÜng data «6UfCa5, gathering and maintaining tho data noodod, and computing «rW ravrawing Ih» collodion of information. Send comment» regarding thlj bunion ettlmat« of any other aspect of Ihia collodion of Information. mclLB.na JWOcitlona for roJuclro INl txjrcjon to Washington HoadquarTora Sorvicoo. Directorate for Information Oparation« »~f R-port«, 1215 Joffarion Q.uii Highway. Suit» 120-1. A/Iington. VA 22J02-43O3. and la ITK Offlc« of Managama« artf Budgot, Paperwork Rodujtion Project (OIM-Otaa). Wo»Siri3»n,'DC 20503.

Cite this paper

@inproceedings{ThornsSpatiallySG, title={Spatially Selective Growth and Modification of Wide Bandgap Semiconductor Surfaces}, author={Brian D. Thorns} }