Spatial-frequency multiplication with multilevel interference lithography

  title={Spatial-frequency multiplication with multilevel interference lithography},
  author={Chih-Hao Chang and Y. Zhao and R. Heilmann and M. Schattenburg},
  journal={Journal of Vacuum Science \& Technology B},
The authors present a large-area spatial-frequency multiplication fabrication process for patterning one-dimensional periodic structures using multilevel interference lithography. In this process, multiple grating levels with different phase offsets are overlaid by aligning to a reference grating. Each grating level is pattern transfered into a single hard mask layer, effectively reducing the grating period. The linewidth of the grating lines is controlled with nanometer repeatability by plasma… Expand
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