• Corpus ID: 49381850

Spatial Coherence in Interferometry Zygo ’ s new method to reduce intrinsic noise in interferometers

@inproceedings{Kchel2004SpatialCI,
  title={Spatial Coherence in Interferometry Zygo ’ s new method to reduce intrinsic noise in interferometers},
  author={Michael F. K{\"u}chel},
  year={2004}
}
This paper describes a new light source, called the “Ring of Fire” (RoF), with a specific spatial coherence function, which greatly reduces the intrinsic instrument noise. The evaluation of a series of very simple measurements taken with a conventional point light source and the RoF show clearly the very large gain in S/N ratio as a function of spatial frequencies obtained with this new light source. Introduction The introduction of the Laser as the standard light source for interferometers… 
Applications of optical coherence in interferometric metrology
  • P. D. de Groot
  • Physics
    Speckle: International Conference on Speckle Metrology
  • 2018
Limited light source coherence can be both a complication and a benefit to interferometric optical metrology. Although high-coherence lasers are great for displacement measuring interferometry,
Application of a synthetic extended source for interferometry.
TLDR
A parametric model to quantify measurement noise due to diffraction from small particles is developed and used to evaluate SES designs and results are shown that validate the modeling.
Design of 4"-high spatial resolution interferometer
  • Gui-ping Shen, Qiao Xu, X. Lei
  • Physics
    International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)
  • 2006
The goal of this 4" phase shifting Fizeau interferometer design is to measure the small scale deformations of the optical surface down to 0.1 millimeter in 100 millimeter diameter. In this paper, the
Experimental study on virtual spatially extended source
One of the most important factor in influencing interferometer measurement accuracy is coherent noise .To improve measurement accuracy, the coherent noise of interferometric system should be reduced
Interferometric measurement of rotationally symmetric aspheric surfaces
The measurement of aspheric surfaces in a Fizeau interferometer implies a sometimes dramatic increase in dynamic range, in terms of acceptable slope and departure, which can run the risk of
Interferometric measurement of rotationally symmetric aspheric surfaces
The measurement of aspheric surfaces in a Fizeau interferometer implies a sometimes dramatic increase in dynamic range, in terms of acceptable slope and departure, which can run the risk of
Binary pseudorandom array test standard optimized for characterization of large field-of-view optical interferometers
TLDR
Compared with the previous coded-aperture based design, the improved, ‘highly randomized’ BPRA pattern of the new test standard provides better accuracy and reliability of instrument MTF and aberration characterization, and enables operation optimization of large aperture optical interferometers.
Numerical noise reduction via diffraction for surface profiling interferometry
Phase profiles obtained by phase shifting interferometry often include undesirable concentric ripple-noises, like "bull's-eye patterns" which are caused by scattering from defects on surfaces of
Contributions of holography to the advancement of interferometric measurements of surface topography
Two major fields of study in optics—holography and interferometry—have developed at times independently and at other times together. The two methods share the principle of holistically recording as

References

SHOWING 1-6 OF 6 REFERENCES
Three-dimensional sensing of rough surfaces by coherence radar.
We introduce a three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface. This differs from conventional
Principles of Optics
Abhängigkeit des Kontrastes der Fizeau-Streifen im Michelson-Interferometer vom Durchmesser der Aperturblende
  • Optik 15, 560-564 (1958).
  • 1958
Orts- und Frequenzraumverfahren zur quantitativen Analyse optischer Oberflächen”. VDI Fortschrittberichte Reihe 8: Meß-, Steuerungs- und Regelungstechnik, Nr
  • 1996
: “ Orts - und Frequenzraumverfahren zur quantitativen Analyse optischer Oberflächen ”
  • Reducing Coherent Artifacts in an Interferometer , international patent application WO 02 / 090880 A 1
Die Sichtbarkeit der Interferenzen beim Twyman-Interferometer
  • Optik 12, 5-16 (1955).
  • 1955