Solution-Processed Low-Operating-Voltage Thin-Film Transistors With Bottom-Gate Top-Contact Structure

It was demonstrated that low-operating-voltage bottom-gate top-contact (BGTC) structure thin-film transistors (TFTs) were fabricated using solution-processed amorphous zinc indium tin oxide (ZITO) and hafnium aluminum oxide (HAO) films. Due to the excellent chemical stability of ZITO film and high etching selectivity between ZITO and indium tin oxide (or… (More)