Solid-source metal–organic molecular beam epitaxy of epitaxial RuO2

  title={Solid-source metal–organic molecular beam epitaxy of epitaxial RuO2},
  author={William T Nunn and S. U. K. Nair and Hwanhui Yun and Anusha Kamath Manjeshwar and Anil Kumar Rajapitamahuni and Dooyong Lee and K. Andre Mkhoyan and Bharat Jalan},
  journal={APL Materials},
A seemingly simple oxide with a rutile structure, RuO2 has been shown to possess several intriguing properties ranging from strain-stabilized superconductivity to a strong catalytic activity. Much interest has arisen surrounding the controlled synthesis of RuO2 films but, unfortunately, utilizing atomically-controlled deposition techniques like molecular beam epitaxy (MBE) has been difficult due to the ultra-low vapor pressure and low oxidation potential of Ru. Here, we demonstrate the growth… 
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