Soft-x-ray projection lithography experiments using Schwarzschild imaging optics.


Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new Schwarzschild housing, designed for improved alignment… (More)
DOI: 10.1364/AO.32.007068

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