Soft lithography of microfluidics channels using SU-8 mould on glass substrate for low cost fabrication

Abstract

Soft lithography describes the moulding of polymers using master templates, a technology that is widely used in microfluidics fabrication. This study outlines a quick and low cost soft lithography processing using negative photoresist (PR) SU-8 on glass substrate to create a master template for subsequent Polydimethylsiloxane (PDMS) replication in overall… (More)

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