Soft X-ray reflectivity and structure evaluation of CoCr/C multilayer X-ray mirrors for spectral region around 6nm

@inproceedings{Takenaka2001SoftXR,
  title={Soft X-ray reflectivity and structure evaluation of CoCr/C multilayer X-ray mirrors for spectral region around 6nm},
  author={Hisataka Takenaka and Kiyoyuki Nagai and Hisashi Ito and Yasuji Muramatsu and Tomoaki Kawamura and Eric M. Gullikson and Rupert C. C. Perera},
  year={2001}
}
Abstract The development of highly-reflective multilayer mirrors for use in the 6-nm region is desired for X-ray photoemission spectroscopy for inner-shell excitation using a Schwarzschild objective. For this application, reflectivity is the most critical parameter determining the performance of multilayer mirrors, because the reflectivities of multilayers in the 6-nm region are generally very low. We have designed CoCr/C multilayer mirrors with a comparatively high reflectivity at around… CONTINUE READING