Soft X-ray microscopy at a spatial resolution better than 15 nm

@article{Chao2005SoftXM,
  title={Soft X-ray microscopy at a spatial resolution better than 15 nm},
  author={Weilun Chao and Bruce D. Harteneck and J. Alexander Liddle and Erik Hyde Anderson and D Attwood},
  journal={Nature},
  year={2005},
  volume={435},
  pages={1210-1213}
}
Analytical tools that have spatial resolution at the nanometre scale are indispensable for the life and physical sciences. It is desirable that these tools also permit elemental and chemical identification on a scale of 10 nm or less, with large penetration depths. A variety of techniques in X-ray imaging are currently being developed that may provide these combined capabilities. Here we report the achievement of sub-15-nm spatial resolution with a soft X-ray microscope—and a clear path to… 
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