Soft UV Nanoimprint Lithography : A Versatile Tool for Nanostructuration at the 20 nm Scale

@inproceedings{Cattoni2012SoftUN,
  title={Soft UV Nanoimprint Lithography : A Versatile Tool for Nanostructuration at the 20 nm Scale},
  author={Andrea Cattoni and Jinghua Chen and Dominique Decanini and Jian Shi and Anne-Marie Haghiri-Gosnet},
  year={2012}
}
1.1 Why soft UV nanoimprint lithography? Since the pioneering work of Whitesides and coworkers on microContact Printing (mCP) and Soft Lithography (Kumar & Whitesides (1993)) (Xia & Whitsides (1998)), considerable progress has been made in the last years and Soft Lithography is now a well consolidated technology utilized in academic and industrial laboratories (Rogers & Nuzzo (2005)). These printing methods use a flexible elastomer material named PDMS (poly(dimethylsiloxane)) to transfer… CONTINUE READING