Soft Magnetic Properties of Nanocrystalline Amorphous HITPERM Films and Multilayers

Abstract

Amorphous precursors to HITPERM (Fe, Co)–Zr–B–Cu (a-HITPERM) films and a-HITPERM/SiO2 multilayer films have been deposited on glass or Si substrates by a rf sputtering system with a target of composition (Fe0 7Co0 3)88Zr7B4Cu1. It was found that the a-HITPERM single layer film with a thickness of 100 nm possessed good soft magnetic properties with a… (More)

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