Single-shot soft x-ray laser-induced ablative microstructuring of organic polymer with demagnifying projection.

Abstract

We report on a single-shot micropatterning of an organic polymer achieved by ablation with demagnifying projection using a Ne-like Zn 21.2 nm soft x-ray laser. A nickel mesh with a period of 100 microm was approximately 10x demagnified and imprinted on poly(methyl methacrylate) via direct ablation. The quality of the ablated microstructure was found to be… (More)

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Cite this paper

@article{Mocek2008SingleshotSX, title={Single-shot soft x-ray laser-induced ablative microstructuring of organic polymer with demagnifying projection.}, author={Tomas Mocek and Bedx0159ich Rus and Maria Kozlova and Jodie L Polan and Patrick Homer and Libor Juha and Věra H{\'a}jkov{\'a} and Jakub Chalupsk{\'y}}, journal={Optics letters}, year={2008}, volume={33 10}, pages={1087-9} }