Single-mask microfabrication of three-dimensional objects from strained bimorphs

@inproceedings{Moiseeva2007SinglemaskMO,
  title={Single-mask microfabrication of three-dimensional objects from strained bimorphs},
  author={bimorphs E Moiseeva and Cindy K. Harnett},
  year={2007}
}
Recently, techniques known as ‘micro-origami’ or ‘strain architecture’ have emerged for the fabrication of out-of-plane microand nanostructures by relaxation of a pair of strain-mismatched thin films. Applications of such structures include optical reflectors, actuators and micropositioners. We illustrate how control of the folding order can generate… CONTINUE READING