Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature range

  title={Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature range},
  author={E. Jesper Eklund and Andrei M. Shkel},
This paper presents a fabrication process in which all components of an in-plane piezoresistive accelerometer are fabricated simultaneously using a single mask. By dry-etching a silicon-on-insulator (SOI) wafer that has a specific resistivity, piezoresistors are defined and isolated from each other and from the bulk silicon without the pn-junctions normally required in piezoresistive sensors. In addition to simplifying the fabrication, the temperature range is also extended when compared to… CONTINUE READING
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