Single-electron transistor as a charge sensor for semiconductor applications

  title={Single-electron transistor as a charge sensor for semiconductor applications},
  author={D. Berman and N. Zhitenev and R. Ashoori and H. Smith and M. Melloch},
  journal={Journal of Vacuum Science & Technology B},
  • D. Berman, N. Zhitenev, +2 authors M. Melloch
  • Published 1997
  • Chemistry
  • Journal of Vacuum Science & Technology B
  • We describe the use of aluminum single-electron transistors (SETs) to measure, with extremely high sensitivity, the fluctuation of charge in semiconductor quantum dots. Our method of fabricating SETs results in excellent reliability and reproducibility. 
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