Simultaneous measurement of thicknesses and refractive indices of multiple layers by a low-coherence confocal interference microscope.

@article{Fukano1996SimultaneousMO,
  title={Simultaneous measurement of thicknesses and refractive indices of multiple layers by a low-coherence confocal interference microscope.},
  author={Tomoaki Fukano and Ichirou Yamaguchi},
  journal={Optics letters},
  year={1996},
  volume={21 23},
  pages={
          1942-4
        }
}
We propose a novel technique for simultaneous measurement of layer thicknesses and refractive indices of multiple layers. It is based on a combination of a confocal microscope and low-coherence interferometry. We derived an expression for the geometrical thickness and the refractive index of each layer from both tracing of a marginal ray accepted by a microscope objective and optical path matching conditions. Experimental verification of this method is illustrated by several samples that have a… CONTINUE READING

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