Simulation studies on model selection in pm planning optimization

@article{Lee2015SimulationSO,
  title={Simulation studies on model selection in pm planning optimization},
  author={Minho Lee and James R. Morrison and Adar A. Kalir},
  journal={2015 Winter Simulation Conference (WSC)},
  year={2015},
  pages={2929-2940}
}
In semiconductor manufacturing, preventive maintenance (PM) is complicated and essential. Since tool down time contributes significantly to manufacturing flow variability and thus mean cycle time, effective PM planning is important. Here we extend existing PM planning methods to allow for four categories of PM models. We study the quality of these PM models… CONTINUE READING