Simulation of an atmospheric pressure methane-hydrogen micro-discharge for diamond like carbon (DLC) film deposition

Abstract

A hybrid model has been developed to simulate atmospheric pressure methane-hydrogen micro-discharge for diamond like carbon deposition. The simulation predicts CH2, CH3 and C2H2 as the predominant growth species for diamond like carbon deposition. A strong dependence of soot formation on gas temperature is observed. The results further indicates that the… (More)

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