Simulated annealing-simplex hybrid algorithm for ellipsometric data inversion of multilayer films.

Abstract

A simulated annealing-simplex hybrid algorithm that accurately measures the optical parameters of multilayer films is proposed for ellipsometric data inversion of multilayer films. In single-wavelength ellipsometry experiments, multiple groups of ellipsometric parameters measured by multiple incident angles can determine multiple optical parameters… (More)
DOI: 10.1063/1.4808463

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