Simple selective electron beam patterning on a single nanowire

@article{Kim2006SimpleSE,
  title={Simple selective electron beam patterning on a single nanowire},
  author={Kanghyun Kim and Haeyong Kang and Jung Hwan Huh and Gyu Tae Kim},
  journal={2006 IEEE Nanotechnology Materials and Devices Conference},
  year={2006},
  volume={1},
  pages={408-409}
}
Newly developed techniques of selective electron beam patterning on a single nanowire are introduced without using the coordinate markers on the substrate or with the help of the optical microscopes. Coordinate-less patterning by image processing under scanning electron microscope was efficient to define electrodes patterns on the 100 nm scale nanowires. And a method using an optical microscope image made it possible not only to create fine electrodes of 10 nm order of nanowires but to reduce… CONTINUE READING

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