Simple, novel and low cost numerical aperture increasing lens system for high resolution infrared image in backside failure analysis

  • Li Tian
  • Published 2014 in
    Proceedings of the 21th International Symposium…


As is known to all, we could capture clearer infrared (IR) image from backside as Si substrate was thinner. But if we needed higher resolution image with conventional optical objective lens, we must introduce numerical aperture increasing lens(NAIL) technology or shorter wavelength light to improve numerical aperture (NA) in objective space. Now some… (More)


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