Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths.

Abstract

Silicon nitride is demonstrated as a high performance and cost-effective solution for dense integrated photonic circuits in the visible spectrum. Experimental results for nanophotonic waveguides fabricated in a standard CMOS pilot line with losses below 0.71dB/cm in an aqueous environment and 0.51dB/cm with silicon dioxide cladding are reported. Design and… (More)
DOI: 10.1364/OE.21.014036

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