Silicon nanowire FET arrays for real time detection of chemical activation of cells

Abstract

Silicon nanowire FET arrays have been designed and fabricated with a relatively low-cost, but wafer-scale process without the use of e-beam lithography. An optimized fabrication process that improves the etching uniformity of NWs and also provides a better control of the NW dimensions is presented. The fabricated devices are electrically characterized and… (More)

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