Silicon nanopore membrane technology for an implantable artificial kidney

Abstract

High performance silicon nanoporous membranes have been developed to investigate the feasibility of an implantable bioartificial kidney. The nanoscale pore size is defined by the thickness of a sacrificial layer of silicon dioxide (SiO2), which is grown by thermal oxidation down to 5 nm with 1% variation. Standardized test protocols to examine… (More)

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