Silicon-based waveguide technology and devices

  title={Silicon-based waveguide technology and devices},
  author={Lech Wosinski},
Silica-on silicon and silicon-based integrated devices are key components for future all-optical communication networks. New challenging trends in the photonic integration are towards photonic lightwave circuits (PLCs), based on silicon platforms for monolithic integration of passive dielectric components with semiconductor active photonic devices and electronic circuits. In this paper a novel low temperature Plasma Enhanced Chemical Vapor Deposition (PECVD) technology for silica-based channel… CONTINUE READING