Silicon Microleaks for Inlets of Mass Spectrometers

@inproceedings{Harpold2009SiliconMF,
  title={Silicon Microleaks for Inlets of Mass Spectrometers},
  author={Dan N. Harpold and Niemann Hasso and Brian Glenn Jamieson and Bernard A. Lynch},
  year={2009}
}
Microleaks for inlets of mass spectrometers used to analyze atmospheric gases can be fabricated in silicon wafers by means of photolithography, etching, and other techniques that are commonly used in the manufacture of integrated circuits and microelectromechanical systems. The microleaks serve to limit the flows of the gases into the mass-spectrometer vacuums to specified very small flow rates consistent with the capacities of the spectrometer vacuum pumps. There is a need to be able to… CONTINUE READING

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