Silicon Bulk Micromachined FBAR Filters for W-CDMA Applications

In this paper, fully integrated FBAR (Film Bulk Acoustic Wave Resonator) filters have been newly designed, fabricated, and characterized for W-CDMA mobile communication system applications by using silicon bulk micromachining technology. The proposed FBAR ladder type filters are realized by connecting 3 resonators in series and 4 resonators in parallel. The… CONTINUE READING