Short-channel effects in MOSFET's

  title={Short-channel effects in MOSFET's},
  author={C Pearce and D. S. Yaney},
  journal={IEEE Electron Device Letters},
In this letter we present electrical measurements of threshold voltage on matched transistor pairs which show a channel shortening effect due to the presence of dislocations or metallic precipitates in the device. Such effects could present a limitation on the yield and performance of MOS integrated circuits employing short-channel devices. 
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