Shoaling vibration amplifier with flattened transfer function and suppressed spurious modes

@article{Maiwald2017ShoalingVA,
  title={Shoaling vibration amplifier with flattened transfer function and suppressed spurious modes},
  author={Verena Maiwald and Michelle Mx00FCller and Christian Ritz and Cosmin Ioan Roman and Christofer Hierold},
  journal={2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2017},
  pages={1154-1157}
}
An in-plane vibration sensor with off-resonant band-pass displacement amplification and a differential capacitive readout is presented. The minimum mechanical amplification of 16 dB (i.e. a factor of 6.6) within the designed frequency band from 3–13 kHz is independent of pressure in the range of 6.3 to 64 mbar with a less than 10% change. For a flattened transfer-function a pressure close to 30 mbar is preferred in order to damp the mechanical resonance peaks. The device can be used for low… CONTINUE READING

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