Shaped combs and parametric amplification in inertial MEMS sensors

Abstract

In this paper slope-shaped comb are designed, modeled and experimentally verified for electrostatic parametric amplification of micro-displacements. Parametric resonance techniques applied to inertial sensors requires a periodic stiffness modulation, as expressed by the Mathieu equation, and is generally implemented using gap-varying and non-overlapping… (More)

9 Figures and Tables

Topics

  • Presentations referencing similar topics