Shape control in wafer-based aperiodic 3D nanostructures.

@article{Jeong2014ShapeCI,
  title={Shape control in wafer-based aperiodic 3D nanostructures.},
  author={Hyeon-Ho Jeong and Andrew G. Mark and John G. Gibbs and Thomas Reindl and Ulrike Waizmann and Juergen Weis and Peer Fischer},
  journal={Nanotechnology},
  year={2014},
  volume={25 23},
  pages={
          235302
        }
}
Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continuous sacrificial corral surrounding the features of interest we grow isolated 3D nanostructures that… CONTINUE READING

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