Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices

@article{Heedt2021ShadowwallLO,
  title={Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices},
  author={Sebastian Heedt and Marina Quintero-P'erez and Francesco Borsoi and Alexandra Fursina and Nick van Loo and Grzegorz P. Mazur and Michał P. Nowak and Mark Ammerlaan and Kongyi Li and Svetlana Korneychuk and Jie Shen and May An Y van de Poll and Ghada Badawy and Sa{\vs}a Gazibegovi{\'c} and Nick de Jong and Pavel Aseev and Kevin van Hoogdalem and Erik P.A.M. Bakkers and Leo P Kouwenhoven},
  journal={Nature Communications},
  year={2021},
  volume={12}
}
The realization of hybrid superconductor–semiconductor quantum devices, in particular a topological qubit, calls for advanced techniques to readily and reproducibly engineer induced superconductivity in semiconductor nanowires. Here, we introduce an on-chip fabrication paradigm based on shadow walls that offers substantial advances in device quality and reproducibility. It allows for the implementation of hybrid quantum devices and ultimately topological qubits while eliminating fabrication… 

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